Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses

J. Albert Chiou; Steven Chen

doi:10.1016/j.sna.2008.03.012

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Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses

J. Albert Chiou Steven Chen

Year: 2008 Journal: Sensors and Actuators A Physical Vol: 147 (1)Pages: 332-339 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2008.03.012

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Keywords:

Piezoresistive effect Materials science Residual stress Composite material Nonlinear system Pressure sensor Residual Acoustics Structural engineering Mechanical engineering Engineering Computer science Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses

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