JOURNAL ARTICLE

Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses

J. Albert ChiouSteven Chen

Year: 2008 Journal:   Sensors and Actuators A Physical Vol: 147 (1)Pages: 332-339   Publisher: Elsevier BV
Keywords:
Piezoresistive effect Materials science Residual stress Composite material Nonlinear system Pressure sensor Residual Acoustics Structural engineering Mechanical engineering Engineering Computer science Physics

Metrics

43
Cited By
1.14
FWCI (Field Weighted Citation Impact)
30
Refs
0.81
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Sensor Technologies Research
Physical Sciences →  Engineering →  Biomedical Engineering
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