JOURNAL ARTICLE
Micromachined Piezoresistive Pressure Sensor With High Robustness
Zhiyi LanLei GaoZechun DouJianwei GuoC ChenWeiping LiTongqing LiuYizhou YeXiaodong Huang
Year: 2025 Journal: IEEE Sensors Journal Vol: 25 (14)Pages: 26485-26491 Publisher: IEEE Sensors Council
Keywords:
Piezoresistive effect Robustness (evolution) Pressure sensor Materials science Surface micromachining Microelectromechanical systems Electronic engineering Acoustics Optoelectronics Engineering Mechanical engineering Fabrication Physics Chemistry
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FWCI (Field Weighted Citation Impact)
32
Refs
0.16
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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