Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering

Tae Young; Mu Hee Choi

doi:10.1016/j.apsusc.2013.09.035

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Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering

Tae Young Mu Hee Choi

Year: 2013 Journal: Applied Surface Science Vol: 286 Pages: 131-136 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2013.09.035

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Keywords:

Materials science Tin Doping Zinc Sputter deposition Tin oxide Sputtering Optoelectronics Radio frequency Cavity magnetron Thin film Metallurgy Nanotechnology Computer science Telecommunications

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering

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