Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

Maoshui Lv; Xianwu Xiu; Zhiyong Pang; Ying Dai; Lina Ye; Chuanfu Cheng; Shenghao Han

doi:10.1016/j.tsf.2007.06.173

ScienceGate Book Chapters

JOURNAL ARTICLE

Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

Maoshui Lv Xianwu Xiu Zhiyong Pang Ying Dai Lina Ye Chuanfu Cheng Shenghao Han

Year: 2007 Journal: Thin Solid Films Vol: 516 (8)Pages: 2017-2021 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2007.06.173

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Crystallinity Zirconium Electrical resistivity and conductivity Crystallite Sputter deposition Doping Sputtering Band gap Analytical Chemistry (journal) Zinc Cavity magnetron Grain size Transmittance Thin film Mineralogy Metallurgy Optoelectronics Composite material Chemistry Nanotechnology

Metrics

Cited By

2.32

FWCI (Field Weighted Citation Impact)

Refs

0.89

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Structural, electrical and optical properties of zirconium-doped zinc oxide films prepared by radio frequency magnetron sputtering

Metrics

Citation History

Topics

Related Documents

Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering

Optical and electrical properties of Mg-doped zinc tin oxide films prepared by radio frequency magnetron sputtering

Structural and electrical properties of fluorine-doped zinc tin oxide thin films prepared by radio-frequency magnetron sputtering

Structural, Electrical, and Optical Properties of Bismuth-doped Zinc-oxide Thin Films Grown by Radio-frequency Magnetron Sputtering

Micro/nanomechanical properties of aluminum-doped zinc oxide films prepared by radio frequency magnetron sputtering