JOURNAL ARTICLE

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Keywords:
Fabrication Materials science Resist Electroplating Photopolymer Structuring Layer (electronics) Piezoelectricity Epoxy Inkwell Nanotechnology Composite material Polymer

Metrics

29
Cited By
0.44
FWCI (Field Weighted Citation Impact)
7
Refs
0.67
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
3D IC and TSV technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering

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