Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

L. Dellmann; S. Roth; C. Beuret; L. Paratte; G.-A. Racine; H. Lorenz; M. Despont; Philippe Renaud; P. Vettiger; Ν. F. de Rooij

doi:10.1007/s005420050119

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Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

L. Dellmann S. Roth C. Beuret L. Paratte G.-A. Racine H. Lorenz M. Despont Philippe Renaud P. Vettiger Ν. F. de Rooij

Year: 1998 Journal: Microsystem Technologies Vol: 4 (3)Pages: 147-150 Publisher: Springer Science+Business Media

DOI: 10.1007/s005420050119

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Keywords:

Fabrication Materials science Resist Electroplating Photopolymer Structuring Layer (electronics) Piezoelectricity Epoxy Inkwell Nanotechnology Composite material Polymer

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

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