Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications

L. Dellmann; S. Roth; C. Beuret; G.-A. Racine; H. Lorenz; M. Despont; Philippe Renaud; P. Vettiger; Ν. F. de Rooij

doi:10.1109/sensor.1997.613733

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Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications

L. Dellmann S. Roth C. Beuret G.-A. Racine H. Lorenz M. Despont Philippe Renaud P. Vettiger Ν. F. de Rooij

Year: 2002 Vol: 1 Pages: 641-644

DOI: 10.1109/sensor.1997.613733

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Abstract

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Keywords:

Fabrication Materials science Cantilever Piezoelectricity Ultrasonic motor Electroplating Piezoelectric motor Optoelectronics Nanotechnology Composite material

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3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications

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Citation History

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