Manufacturing of High Aspect Ratio Micro Structures Using UV Sensitive Photopolymer

Abstract

This research work deals with the development of a simple and practical method for manufacturing high aspect ratio micro mechanical parts using three methods. The first method is mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure. In the second and third methods, high aspect ratio polymer structures are produced using a shaped UV laser beam writing and a focused UV laser beam writing, respectively. The accuracy of the solidified polymer when using these methods is examined. Various shapes of micro polymer structures are produced using these methods.