Consideration on the producing of high aspect ratio micro parts using UV sensitive photopolymer

Abstract

This research work deals with the methods for manufacturing high aspect ratio micro mechanical parts by using UV photopolymer. In the first method, polymer structures are produced using a mask-based method. The second method is a direct focused UV laser beam writing method. The irradiated portion of the liquid photopolymer is solidified and it becomes a polymer structure. At first, the solidified shape of the polymer is examined in each method and the optimum conditions to produce high aspect ratio structures are verified. Next, the comparison of both methods is made. Examples of structures that have been produced using the methods described are shown.