Comparative study of two types electro-thermally actuated micromirrors on silicon substrate

Abstract

In this paper are presented the simulation results of two thermally actuated movable micromirrors on silicon-on-insulator. The response of the micromirrors, consisting in the displacement along z axe was investigated in static and dynamic regime using Coventor software taking into account the material parameters and geometry of the structure. Two different ways of actuation were investigated. The usage of diffused resistors as heaters for structure actuation was also investigated. Higher displacement was observed to the actuated structure and also the largest values of the Von Misses stress were concentrated in a few corners of the structure.