JOURNAL ARTICLE
Thermally actuated CMOS micromirrors
Johannes BühlerJohannes FunkOliver PaulF.-P. SteinerH. Baltes
Year: 1995 Journal: Sensors and Actuators A Physical Vol: 47 (1-3)Pages: 572-575 Publisher: Elsevier BV
Keywords:
Cantilever Bimorph Deflection (physics) Materials science CMOS Silicon Bending Microelectromechanical systems Optics Optoelectronics Anisotropy Structural engineering Engineering Composite material Physics
Metrics
57
Cited By
5.28
FWCI (Field Weighted Citation Impact)
4
Refs
0.96
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Materials and Mechanics
Physical Sciences → Engineering → Mechanical Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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