Thermally Actuated Silicon Resonators

BOOK-CHAPTER

Year: 2016 Pages: 4154-4168

DOI: 10.1007/978-94-017-9780-1_308

Keywords:

Silicon Resonator Materials science Optoelectronics

Metrics

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0.46

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering