Nb doped SrTiO3 thin films deposited by pulsed laser ablation

Kensuke Fukushima; Shigeki Shibagaki

doi:10.1016/s0040-6090(97)00752-9

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Nb doped SrTiO3 thin films deposited by pulsed laser ablation

Kensuke Fukushima Shigeki Shibagaki

Year: 1998 Journal: Thin Solid Films Vol: 315 (1-2)Pages: 238-243 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(97)00752-9

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Keywords:

Pulsed laser deposition Thin film Materials science X-ray photoelectron spectroscopy Electrical resistivity and conductivity Torr Lattice constant Laser ablation Analytical Chemistry (journal) Doping Oxygen Substrate (aquarium) Surface roughness Laser Nanotechnology Diffraction Chemistry Optics Optoelectronics Composite material Chemical engineering

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Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Nb doped SrTiO3 thin films deposited by pulsed laser ablation

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