The dielectric properties of pulsed laser deposited SrTiO3 thin films

Shih‐Ming He; D. H. Li; X.W. Deng; X. Z. Liu; Y. Zhang; Yanrong Li

doi:10.1016/s0167-9317(02)01017-1

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The dielectric properties of pulsed laser deposited SrTiO3 thin films

Shih‐Ming He D. H. Li X.W. Deng X. Z. Liu Y. Zhang Yanrong Li

Year: 2003 Journal: Microelectronic Engineering Vol: 66 (1-4)Pages: 891-895 Publisher: Elsevier BV

DOI: 10.1016/s0167-9317(02)01017-1

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Keywords:

Materials science Dielectric Capacitor Thin film Pulsed laser deposition Strontium titanate Optoelectronics Polarization (electrochemistry) Film capacitor Voltage Nanotechnology Electrical engineering Chemistry

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Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

The dielectric properties of pulsed laser deposited SrTiO3 thin films

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