JOURNAL ARTICLE

The dielectric properties of pulsed laser deposited SrTiO3 thin films

Shih‐Ming HeD. H. LiX.W. DengX. Z. LiuY. ZhangYanrong Li

Year: 2003 Journal:   Microelectronic Engineering Vol: 66 (1-4)Pages: 891-895   Publisher: Elsevier BV
Keywords:
Materials science Dielectric Capacitor Thin film Pulsed laser deposition Strontium titanate Optoelectronics Polarization (electrochemistry) Film capacitor Voltage Nanotechnology Electrical engineering Chemistry

Metrics

2
Cited By
0.20
FWCI (Field Weighted Citation Impact)
5
Refs
0.49
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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