JOURNAL ARTICLE

Hydrogen in oxidized silicon oxynitride thin films

Keywords:
Silicon oxynitride Silicon Hydrogen Materials science Thin film Chemical engineering Engineering physics Nanotechnology Chemistry Metallurgy Silicon nitride Organic chemistry Engineering

Metrics

4
Cited By
1.33
FWCI (Field Weighted Citation Impact)
4
Refs
0.82
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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