Substrate effect on mechanical characterizations of aluminum-doped zinc oxide transparent conducting films

Yi-Chung Huang; Shou-Yi Chang

doi:10.1016/j.surfcoat.2010.02.073

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Substrate effect on mechanical characterizations of aluminum-doped zinc oxide transparent conducting films

Yi-Chung Huang Shou-Yi Chang

Year: 2010 Journal: Surface and Coatings Technology Vol: 204 (20)Pages: 3147-3153 Publisher: Elsevier BV

DOI: 10.1016/j.surfcoat.2010.02.073

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Keywords:

Materials science Nanoindentation Substrate (aquarium) Composite material Zinc Polyimide Doping Thin film Elastic modulus Delamination (geology) Aluminium Indentation Sapphire Layer (electronics) Metallurgy Nanotechnology Optics Optoelectronics

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Substrate effect on mechanical characterizations of aluminum-doped zinc oxide transparent conducting films

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