Preparation and mechanical properties of aluminum-doped zinc oxide transparent conducting films

Shou-Yi Chang; Yen-Chih Hsiao; Yi-Chung Huang

doi:10.1016/j.surfcoat.2008.06.024

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Preparation and mechanical properties of aluminum-doped zinc oxide transparent conducting films

Shou-Yi Chang Yen-Chih Hsiao Yi-Chung Huang

Year: 2008 Journal: Surface and Coatings Technology Vol: 202 (22-23)Pages: 5416-5420 Publisher: Elsevier BV

DOI: 10.1016/j.surfcoat.2008.06.024

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Keywords:

Materials science Crystallinity Nanoindentation Sputtering Sputter deposition Composite material Substrate (aquarium) Thin film Metallurgy Mineralogy Nanotechnology Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Preparation and mechanical properties of aluminum-doped zinc oxide transparent conducting films

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