A capacitively excited and detected resonant pressure sensor with temperature compensation

E. Stemme; Göran Stemme

doi:10.1016/0924-4247(92)80057-a

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A capacitively excited and detected resonant pressure sensor with temperature compensation

E. Stemme Göran Stemme

Year: 1992 Journal: Sensors and Actuators A Physical Vol: 32 (1-3)Pages: 639-647 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(92)80057-a

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Keywords:

Excited state Compensation (psychology) Materials science Optoelectronics Atomic physics Analytical Chemistry (journal) Physics Chemistry Environmental chemistry

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

A capacitively excited and detected resonant pressure sensor with temperature compensation

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