An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation

Zhangyang Tang; Shangchun Fan; Weiwei Xing; Zhanshe Guo; Zheng-Yuan Zhang

doi:10.1007/s00542-011-1319-6

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An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation

Zhangyang Tang Shangchun Fan Weiwei Xing Zhanshe Guo Zheng-Yuan Zhang

Year: 2011 Journal: Microsystem Technologies Vol: 17 (9)Pages: 1481-1490 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-011-1319-6

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Keywords:

Compensation (psychology) Materials science Beam (structure) Residual Silicon Diaphragm (acoustics) Excited state Optics Optoelectronics Acoustics Physics Atomic physics Vibration Computer science

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation

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