JOURNAL ARTICLE
High-Quality SOI by Oxygen Implantation into Silicon
A. H. van OmmenH.J. LigthartJ. PolitiekM. P. A. Viegers
Year: 1987 Journal: MRS Proceedings Vol: 93 Publisher: Cambridge University Press
Keywords:
Materials science Annealing (glass) Silicon on insulator Silicon Dislocation Climb Oxygen Oxide Crystallography Superlattice Condensed matter physics Metallurgy Composite material Optoelectronics Chemistry
Metrics
3
Cited By
0.91
FWCI (Field Weighted Citation Impact)
7
Refs
0.75
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences → Engineering → Electrical and Electronic Engineering
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