Excimer laser ablated lead zirconate titanate thin films

Abstract

Lead zirconate titanate (PZT) thin films on platinum coated silicon were prepared by excimer laser ablation and were crystallized by subsequent annealing. Films deposited at various fluences and post-annealed showed slight variations in lead content which seemed to affect the orientation. The relatively lead rich films showed (110) orientation and the orientation changed to (111) as the Pb content decreased. Crystalline perovskite PZT films showed a dielectric constant of 800, a remnant polarization of 32 μC/cm2 and a coercive field of 130 kV/cm.