Pulsed excimer laser deposition and characterization of ferroelectric lead-zirconate-titanate thin films

Abstract

The rapid development of ultralarge-scale integration demands integrated devices from ordinary 1-dimensional integrated devices to 3-dimensional devices and multi-function devices. Because of its non-volatility and radiation-hardness, very large (～1000) dielectric constant and polarizability, ferroelectric thin film and its application research have recently attracted great attention in newly functional materials and integrated devices such as