JOURNAL ARTICLE

Characterisation of aluminium oxide thin films deposited on polycarbonate substrates by reactive magnetron sputtering

Kari KoskiJorma HölsäP. JulietZ.H WangR AimoK.A. Pischow

Year: 1999 Journal:   Materials Science and Engineering B Vol: 65 (2)Pages: 94-105   Publisher: Elsevier BV
Keywords:
Polycarbonate Materials science Aluminium Sputtering Thin film Sputter deposition Composite material High-power impulse magnetron sputtering Aluminium oxide Cavity magnetron Metallurgy Optoelectronics Nanotechnology

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25
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0.11
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Citation History

Topics

ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

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