Characterisation of aluminium oxide thin films deposited on polycarbonate substrates by reactive magnetron sputtering

Kari Koski; Jorma Hölsä; P. Juliet; Z.H Wang; R Aimo; K.A. Pischow

doi:10.1016/s0921-5107(99)00186-5

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Characterisation of aluminium oxide thin films deposited on polycarbonate substrates by reactive magnetron sputtering

Kari Koski Jorma Hölsä P. Juliet Z.H Wang R Aimo K.A. Pischow

Year: 1999 Journal: Materials Science and Engineering B Vol: 65 (2)Pages: 94-105 Publisher: Elsevier BV

DOI: 10.1016/s0921-5107(99)00186-5

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Keywords:

Polycarbonate Materials science Aluminium Sputtering Thin film Sputter deposition Composite material High-power impulse magnetron sputtering Aluminium oxide Cavity magnetron Metallurgy Optoelectronics Nanotechnology

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Characterisation of aluminium oxide thin films deposited on polycarbonate substrates by reactive magnetron sputtering

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