JOURNAL ARTICLE

Aluminium nitride thin films deposited by DC reactive magnetron sputtering

Keywords:
Materials science Microstructure Refractive index Indentation hardness Sputter deposition Aluminium Transmittance Sputtering Nitride Thin film Optoelectronics Aluminium nitride Cavity magnetron Composite material Analytical Chemistry (journal) Layer (electronics) Chemistry Nanotechnology

Metrics

46
Cited By
0.00
FWCI (Field Weighted Citation Impact)
15
Refs
0.11
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials

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