Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining

Abstract

A novel fiber-optic tip accelerometer based on Fabry-Perot (F-P) interferometer is proposed and demonstrated, with potential to operate under high temperature, in this paper. Such a tip accelerometer is directed fabricated on a large cladding fiber end by using the 157nm laser-micromachining technology. With the calibration of a micro electro mechanical systems (MEMS) accelerometer, the sensitivity of such a fiber-optic F-P accelerometer is 1.764 rad/g. The minimum detective acceleration is estimated to be 20μg.