1100°C fiber-optic high-temperature Fabry-Perot sensors fabricated by laser-micromachining

Abstract

Two laser-machined high-sensitivity fiber-optic Fabry-Perot (F-P) high temperature sensors based on sapphire and silica fibers are fabricated by laser-micromachining and demonstrated in this paper, respectively. The temperature characteristics of the sapphire and silica fiber sensor are investigated over a temperature range from 100°C to 1100°C. Experiment result shows that the sapphire F-P sensor has a temperature sensitivity of ~50 pm/°C with a linearity of 0.999, which is 5 times higher than that of the silica F-P sensor.