High-temperature fiber-optic Fabry–Perot interferometric pressure sensor fabricated by femtosecond laser

Abstract

In this Letter, we report on a fiber-optic Fabry-Perot interferometric pressure sensor with its external diaphragm surface thinned and roughened by a femtosecond laser. The laser-roughened surface helps to eliminate outer reflections from the external diaphragm surface and makes the sensor immune to variations in the ambient refractive index. The sensor is demonstrated to measure pressure in a high-temperature environment with low-temperature dependence.