&lt;title&gt;Compact excimer laser system&lt;/title&gt;

D. Drăgulinescu; C. Grigoriu; L. Tobos

doi:10.1117/12.144676

ScienceGate Book Chapters

JOURNAL ARTICLE

<title>Compact excimer laser system</title>

D. Drăgulinescu C. Grigoriu L. Tobos

Year: 1993 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 1810 Pages: 410-413 Publisher: SPIE

DOI: 10.1117/12.144676

Get Full-Text PDF Get Analytical Report

Abstract

This paper describes the design and operating characteristics of a KrF laser which operates at variable pulse repetition rates up to 100 pps.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Keywords:

Optical engineering Excimer laser Computer science Laser Optics Upload Repetition (rhetorical device) Excimer Optoelectronics Materials science Physics Operating system

Metrics

Cited By

0.46

FWCI (Field Weighted Citation Impact)

Refs

0.64

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

<title>Compact excimer laser system</title>

Abstract

Metrics

Topics

Related Documents

<title>Large aperture excimer laser system</title>

<title>Excimer Laser Technology</title>

<title>Excimer laser optics</title>

<title>Excimer Laser Market</title>

<title>Excimer laser micromachining</title>