&lt;title&gt;Excimer laser optics&lt;/title&gt;

N. V. Morozov; S. I. Sagitov; P. B. Sergeyev

doi:10.1117/12.27568

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JOURNAL ARTICLE

<title>Excimer laser optics</title>

N. V. Morozov S. I. Sagitov P. B. Sergeyev

Year: 1991 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 1441 Pages: 557-564 Publisher: SPIE

DOI: 10.1117/12.27568

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Abstract

For optical materials mirrors and antirerleotion coatings the laser damage resistance resul ts for XeCl Kr ArP eximer laser wavelengths are presented.

Keywords:

Excimer laser Laser Materials science Optics Optoelectronics Wavelength Excimer X-ray laser Laser power scaling Physics

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0.62

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Topics

Solid State Laser Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser Design and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Systems and Laser Technology

Physical Sciences → Engineering → Electrical and Electronic Engineering

<title>Excimer laser optics</title>

Abstract

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