<title>Excimer Laser Technology</title>

Abstract

Scaling presently available excimer laser systems to lasers designed to operate at high average power and high pulse repetition rates for long periods of time requires advances in many areas of engineering technology. For economical application to industrial processes, the efficiency must be increased. This leads to more stringent requirements on preionization techniques, energy delivery systems, and system chemistry. Long life operation (>10⁹-10¹⁰ pulses) requires development of new pulse power components, optical elements and flow system components. A broad-based program underway at the Los Alamos Scientific Laboratory is addressing these key technology issues, with the help of advanced component and systems development programs in industry. A prototype XeCl laser meeting all requirements for efficiency, system performance and life is scheduled for completion in 1984.