Microstructure of SiC deposited from methyltrichlorosilane

Б. Резник; Dagmar Gerthsen; Weigang Zhang; Klaus J. Hüttinger

doi:10.1016/s0955-2219(02)00364-3

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Microstructure of SiC deposited from methyltrichlorosilane

Б. Резник Dagmar Gerthsen Weigang Zhang Klaus J. Hüttinger

Year: 2003 Journal: Journal of the European Ceramic Society Vol: 23 (9)Pages: 1499-1508 Publisher: Elsevier BV

DOI: 10.1016/s0955-2219(02)00364-3

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Keywords:

Materials science High-resolution transmission electron microscopy Microstructure Nanocrystal Phase (matter) Chemical engineering Crystal twinning Chlorine Silicon carbide Nanostructure Analytical Chemistry (journal) Transmission electron microscopy Nanotechnology Composite material Metallurgy Organic chemistry

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Silicon Carbide Semiconductor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fiber-reinforced polymer composites

Physical Sciences → Engineering → Mechanical Engineering

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Microstructure of SiC deposited from methyltrichlorosilane

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