Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering

Tingting Zhao; Tao Yang; Bin Yao; Chunxiao Cong; Yingrui Sui; Guozhong Xing; Yuhai Sun; Shi Su; Hong Zhu; D.Z. Shen

doi:10.1016/j.tsf.2009.09.008

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Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering

Tingting Zhao Tao Yang Bin Yao Chunxiao Cong Yingrui Sui Guozhong Xing Yuhai Sun Shi Su Hong Zhu D.Z. Shen

Year: 2009 Journal: Thin Solid Films Vol: 518 (12)Pages: 3289-3292 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2009.09.008

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Keywords:

Acceptor Conductivity Electrical resistivity and conductivity Doping Annealing (glass) Analytical Chemistry (journal) Wurtzite crystal structure Sputter deposition Sputtering Chemistry Materials science Lithium (medication) Electron mobility Thin film Zinc Optoelectronics Physical chemistry Nanotechnology Metallurgy Organic chemistry Condensed matter physics

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering

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