JOURNAL ARTICLE

Properties of magnetron sputtered hydrogenated amorphous and microcrystalline silicon films alloyed with germanium

Nobuo SaitoTomoaki TeradaTetsuo Yamaguchi

Year: 1986 Journal:   Journal of Non-Crystalline Solids Vol: 83 (1-2)Pages: 42-48   Publisher: Elsevier BV
Keywords:
Microcrystalline Materials science Amorphous solid Photoconductivity Sputter deposition Hydrogen Amorphous silicon Optoelectronics Band gap Thin film Germanium Sputtering Silicon Analytical Chemistry (journal) Crystallography Nanotechnology Chemistry Crystalline silicon

Metrics

4
Cited By
0.92
FWCI (Field Weighted Citation Impact)
19
Refs
0.76
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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