JOURNAL ARTICLE
Properties of magnetron sputtered hydrogenated amorphous silicon
Year: 1990 Journal: Vacuum Vol: 40 (1-2)Pages: 237-237 Publisher: Elsevier BV
Keywords:
Cavity magnetron Materials science Amorphous silicon Amorphous solid Silicon Optoelectronics Sputter deposition High-power impulse magnetron sputtering Nanotechnology Thin film Chemistry Sputtering Crystallography Crystalline silicon
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
Metallic Glasses and Amorphous Alloys
Physical Sciences → Engineering → Mechanical Engineering
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