Light-induced changes in magnetron-sputtered hydrogenated amorphous silicon films

Debajyoti Das; Ratnabali Banerjee; A. K. Batabyal; A. K. Barua

doi:10.1016/0040-6090(88)90140-x

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Light-induced changes in magnetron-sputtered hydrogenated amorphous silicon films

Debajyoti Das Ratnabali Banerjee A. K. Batabyal A. K. Barua

Year: 1988 Journal: Thin Solid Films Vol: 164 Pages: 227-231 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(88)90140-x

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Keywords:

Materials science Photoconductivity Amorphous silicon Amorphous solid Cavity magnetron Sputter deposition Silicon Electrical resistivity and conductivity Metastability Optoelectronics Atmospheric temperature range Activation energy Conductivity Deposition (geology) Thin film Crystalline silicon Sputtering Chemistry Nanotechnology Crystallography Electrical engineering Physical chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Light-induced changes in magnetron-sputtered hydrogenated amorphous silicon films

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