Spectroscopic ellipsometry study of thin film thermo-optical properties

Hui Xie; Fern Lan Ng; X.T. Zeng

doi:10.1016/j.tsf.2009.03.159

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Spectroscopic ellipsometry study of thin film thermo-optical properties

Hui Xie Fern Lan Ng X.T. Zeng

Year: 2009 Journal: Thin Solid Films Vol: 517 (17)Pages: 5066-5069 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2009.03.159

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Keywords:

Ellipsometry Refractive index Thin film Materials science Scanning electron microscope Analytical Chemistry (journal) Wafer Annealing (glass) Optics Silicon Chemistry Optoelectronics Composite material Nanotechnology

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Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Liquid Crystal Research Advancements

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Spectroscopic ellipsometry study of thin film thermo-optical properties

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