JOURNAL ARTICLE

Spectroscopic ellipsometry study of thin film thermo-optical properties

Hui XieFern Lan NgX.T. Zeng

Year: 2009 Journal:   Thin Solid Films Vol: 517 (17)Pages: 5066-5069   Publisher: Elsevier BV
Keywords:
Ellipsometry Refractive index Thin film Materials science Scanning electron microscope Analytical Chemistry (journal) Wafer Annealing (glass) Optics Silicon Chemistry Optoelectronics Composite material Nanotechnology

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16
Cited By
0.69
FWCI (Field Weighted Citation Impact)
11
Refs
0.69
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Liquid Crystal Research Advancements
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
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