JOURNAL ARTICLE
Imaging Spectroscopic Ellipsometry (ISE): Optical Properties and Thin Film Metrology of ALD printed Microstructures.
Keywords:
Metrology Thin film Ellipsometry Atomic layer deposition Reflectivity
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Topics
Mycorrhizal Fungi and Plant Interactions
Life Sciences → Agricultural and Biological Sciences → Plant Science
Genomics and Phylogenetic Studies
Life Sciences → Biochemistry, Genetics and Molecular Biology → Molecular Biology
Plant Pathogens and Fungal Diseases
Life Sciences → Biochemistry, Genetics and Molecular Biology → Cell Biology
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