GROWTH AND PROPERTIES OF YBCO SUPERCONDUCTING THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING FROM A PAIR OF SUPERCONDUCTING STOICHIOMETRIC YBCO TARGETS

Abstract

Superconducting YBCO thin films have been fabricated by dc magnetron sputtering from a pair of stoichiometric YBCO superconducting targets on polycrystalline ZrO 2 substrates. The post-annealing superconducting films exhibit the properties with the critical onset temperature of 95 K and zero resistivity temperature at 83 K. The relation between the composition of the film and the radial position of the substrate is investigated. The XRD analysis proved that the films are mainly orthorhombic polycrystalline structure.