In-situ deposition of superconducting YBCO thin films by magnetron sputtering from powder target

Wenqin Luo; A. L. Ding; K. Chan; Guohua Shi; Alex Yu-Ching Cheng; E. C. M. Young

doi:10.1007/bf00617623

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In-situ deposition of superconducting YBCO thin films by magnetron sputtering from powder target

Wenqin Luo A. L. Ding K. Chan Guohua Shi Alex Yu-Ching Cheng E. C. M. Young

Year: 1992 Journal: Journal of Superconductivity Vol: 5 (3)Pages: 239-244 Publisher: Springer Science+Business Media

DOI: 10.1007/bf00617623

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Keywords:

Materials science Sputter deposition Thin film Deposition (geology) Sputtering Superconductivity Stoichiometry Cavity magnetron High-temperature superconductivity In situ Analytical Chemistry (journal) Optoelectronics Nanotechnology Condensed matter physics

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Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Particle accelerators and beam dynamics

Physical Sciences → Engineering → Aerospace Engineering

In-situ deposition of superconducting YBCO thin films by magnetron sputtering from powder target

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