Preparation of in-situ superconducting YBCO thin films by single target magnetron sputtering

C.E. Caley; James P. Collman; W. A. Little

doi:10.1016/0921-4534(89)91192-1

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Preparation of in-situ superconducting YBCO thin films by single target magnetron sputtering

C.E. Caley James P. Collman W. A. Little

Year: 1989 Journal: Physica C Superconductivity Vol: 162-164 Pages: 651-652 Publisher: Elsevier BV

DOI: 10.1016/0921-4534(89)91192-1

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Keywords:

Materials science Substrate (aquarium) Sputter deposition Superconductivity Thin film Sputtering In situ Stoichiometry Argon Analytical Chemistry (journal) Cavity magnetron Oxygen Planar Optoelectronics Condensed matter physics Chemistry Nanotechnology Physics

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Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Superconductivity in MgB2 and Alloys

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Preparation of in-situ superconducting YBCO thin films by single target magnetron sputtering

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