Mechanism of H2 desorption from H-terminated Si(001) surfaces

Takanobu Watanabe; Tyuji Hoshino; Iwao Ohdomari

doi:10.1016/s0169-4332(97)80053-0

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Mechanism of H2 desorption from H-terminated Si(001) surfaces

Takanobu Watanabe Tyuji Hoshino Iwao Ohdomari

Year: 1997 Journal: Applied Surface Science Vol: 117-118 Pages: 67-71 Publisher: Elsevier BV

DOI: 10.1016/s0169-4332(97)80053-0

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Keywords:

Desorption Hydride Activation energy Chemistry Chemical physics Molecular orbital Mechanism (biology) Physical chemistry Computational chemistry Hydrogen Molecule Adsorption Physics Organic chemistry

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Advanced Chemical Physics Studies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Mechanism of H2 desorption from H-terminated Si(001) surfaces

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