Deposition and characterization of zinc oxide thin films for hydrogen sensor devices

Atanu Dutta; Tapas K. Chaudhuri; S. Basu

doi:10.1016/0921-5107(92)90324-3

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Deposition and characterization of zinc oxide thin films for hydrogen sensor devices

Atanu Dutta Tapas K. Chaudhuri S. Basu

Year: 1992 Journal: Materials Science and Engineering B Vol: 14 (1)Pages: 31-35 Publisher: Elsevier BV

DOI: 10.1016/0921-5107(92)90324-3

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Keywords:

Materials science Crystallinity Zinc Thin film Heterojunction Crystallite Deposition (geology) Oxide Polycrystalline silicon Hydrogen Electrical resistivity and conductivity Chemical vapor deposition Silicon Analytical Chemistry (journal) Chemical engineering Optoelectronics Inorganic chemistry Nanotechnology Thin-film transistor Metallurgy Composite material Chemistry Layer (electronics) Electrical engineering Environmental chemistry

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Deposition and characterization of zinc oxide thin films for hydrogen sensor devices

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