Hydrogen Diffusion in Zinc Oxide Thin Films

W. Beyer; U. Breuer; Frank Hamelmann; J. Hüpkes; Andrea Stärk; H. Stiebig; U. Zastrow

doi:10.1557/proc-1165-m05-24

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JOURNAL ARTICLE

Hydrogen Diffusion in Zinc Oxide Thin Films

W. Beyer U. Breuer Frank Hamelmann J. Hüpkes Andrea Stärk H. Stiebig U. Zastrow

Year: 2009 Journal: MRS Proceedings Vol: 1165 Publisher: Cambridge University Press

DOI: 10.1557/proc-1165-m05-24

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Keywords:

Materials science Hydrogen Thin film Zinc Annealing (glass) Analytical Chemistry (journal) Diffusion Amorphous solid Secondary ion mass spectrometry Sputtering Silicon Chemical engineering Ion Crystallography Nanotechnology Metallurgy Thermodynamics Chemistry Organic chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Hydrogen Diffusion in Zinc Oxide Thin Films

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