Deposition and Characterization of Zinc Oxide Films

Abstract

Zinc oxide (ZnO) is suitable for optoelectronic applications due to its electrical and optical properties. The present work deals with the preparation and characterization of ZnO films deposited by the ultrasonic spray pyrolysis method. The starting solution was zinc acetate. Effects of substrate temperature on films properties have been investigated. Optical properties of the films have been characterized by investigating transmittance, absorbance and photoluminescence (PL) spectra. Optical transmission spectrum shows that ZnO films have high transmission (about 80%) in visible region for substrate temperatures at 350oC. Surface morphology of the films has also been analyzed by atomic force microscope (AFM). Four probes conductivity measurements have been used for electrical characterization. The resistivity of ZnO films increases with increasing substrate temperatures