LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Saı̈d Agouram; F. Bodart; G. Terwagne

doi:10.1016/j.elspec.2003.10.004

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LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Saı̈d Agouram F. Bodart G. Terwagne

Year: 2003 Journal: Journal of Electron Spectroscopy and Related Phenomena Vol: 134 (2-3)Pages: 173-181 Publisher: Elsevier BV

DOI: 10.1016/j.elspec.2003.10.004

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Keywords:

X-ray photoelectron spectroscopy Analytical Chemistry (journal) Thin film Sputtering Sputter deposition Chromium Materials science Stoichiometry Rutherford backscattering spectrometry Argon Nuclear reaction analysis Hydrogen Chemistry Chemical engineering Metallurgy Nanotechnology Physical chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

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