Reactive-magnetron-sputtered chromium carbide films

Vandna Agarwal; V. D. Vankar; K. L. Chopra

doi:10.1016/0040-6090(89)90711-6

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Reactive-magnetron-sputtered chromium carbide films

Vandna Agarwal V. D. Vankar K. L. Chopra

Year: 1989 Journal: Thin Solid Films Vol: 169 (2)Pages: 281-288 Publisher: Elsevier BV

DOI: 10.1016/0040-6090(89)90711-6

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Keywords:

Chromium Chromium carbide Acetylene Materials science Carbide Microstructure Sputter deposition Chromium hydride Hydrogen Carbon fibers Metallurgy Sputtering Chemical engineering Thin film Chemistry Composite material Composite number Nanotechnology Organic chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Reactive-magnetron-sputtered chromium carbide films

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