Photo-assisted metal-organic chemical vapor deposition of CaCu3Ti4O12 (CCTO) thin films

Nishant Gupta; Colin D. McMillen

doi:10.1016/j.mssp.2013.03.013

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Photo-assisted metal-organic chemical vapor deposition of CaCu3Ti4O12 (CCTO) thin films

Nishant Gupta Colin D. McMillen

Year: 2013 Journal: Materials Science in Semiconductor Processing Vol: 16 (5)Pages: 1297-1302 Publisher: Elsevier BV

DOI: 10.1016/j.mssp.2013.03.013

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Keywords:

Materials science Chemical vapor deposition Thin film Metal Combustion chemical vapor deposition Chemical engineering Nanotechnology Carbon film Metallurgy

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Dielectric properties of ceramics

Physical Sciences → Materials Science → Materials Chemistry

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Multiferroics and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Photo-assisted metal-organic chemical vapor deposition of CaCu3Ti4O12 (CCTO) thin films

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