JOURNAL ARTICLE

Buried Oxide in Silicon by Oxygen Implantation Into Scanned Wafers

Keywords:
Materials science Wafer Annealing (glass) Silicon Silicon on insulator Oxygen Oxide Optoelectronics Composite material Metallurgy Chemistry

Metrics

2
Cited By
0.93
FWCI (Field Weighted Citation Impact)
5
Refs
0.75
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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