JOURNAL ARTICLE
Oxidation in a glow discharge to obtain dielectric films
Year: 1965 Journal: Vacuum Vol: 15 (6)Pages: 317-317 Publisher: Elsevier BV
Keywords:
Glow discharge Dielectric Materials science Dielectric barrier discharge Analytical Chemistry (journal) Engineering physics Optoelectronics Chemistry Plasma Environmental chemistry Physics Nuclear physics
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Topics
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Plasma Diagnostics and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
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