JOURNAL ARTICLE
Silicon films deposited on flexible substrate by hot-wire chemical-vapor deposition
Ming‐Chun TsengRay‐Hua HorngDong‐Sing WuuShui-Yang Lien
Year: 2014 Journal: Vacuum Vol: 118 Pages: 109-112 Publisher: Elsevier BV
Keywords:
Materials science Silicon Crystallinity Substrate (aquarium) Chemical vapor deposition Microcrystalline Nanocrystalline silicon Surface roughness Hydrogen Amorphous solid Dilution Thin film Chemical engineering Amorphous silicon Crystalline silicon Analytical Chemistry (journal) Nanotechnology Composite material Chemistry Optoelectronics Organic chemistry Crystallography
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2
Cited By
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FWCI (Field Weighted Citation Impact)
12
Refs
0.07
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Citation History
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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