JOURNAL ARTICLE

Improvement of the Crystallinity of Silicon Films Deposited by Hot-Wire Chemical Vapor Deposition with Negative Substrate Bias

Lei ZhangHonglie ShenJiayi You

Year: 2013 Journal:   Journal of Electronic Materials Vol: 42 (8)Pages: 2464-2469   Publisher: Springer Science+Business Media
Keywords:
Crystallinity Materials science Substrate (aquarium) Silicon Chemical vapor deposition Raman spectroscopy Scanning electron microscope Crystallization Microcrystalline silicon Chemical engineering Composite material Metallurgy Crystalline silicon Optoelectronics Optics Amorphous silicon

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3
Cited By
0.21
FWCI (Field Weighted Citation Impact)
25
Refs
0.60
Citation Normalized Percentile
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Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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